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Semiconductor Manufacturing



Function: Personnel and plant protection in chemical vapour deposition, ion implantation, metal-oxide vapour deposition, doping, laser etching and storage.

Typical Gases: HC, Cl2, HCl, HCN, SO2, PH3, SiH4, AsH3, H2, HF, O2

Monicon detectors: CGS500, T100, S500

Monicon controllers: Single Channel, 4 Channel, Multi-channel




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Monicon Technology Ltd - Ballybrit Industrial Estate - Galway - Ireland
Tel: +353 91 752884 Fax: +353 91 752886 Email: sales@monicon.com