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              Green Houses
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		      Function: Personnel and plant protection in chemical vapour   deposition, ion implantation, metal-oxide vapour deposition, doping, laser   etching and storage.
Typical Gases: HC, Cl2, HCl, HCN, SO2, PH3, SiH4, AsH3, H2, HF, O2
Monicon detectors: CGS500, T100, S500
Monicon controllers: Single Channel, 4 Channel, Multi-channel